Where Microns Matter: Microfabrication Facilities of the Science and Engineering Research Council

Subtitle

Microfabrication facilities of the Science and Engineering Research Council

Synopsis

Describes stages of microcircuit fabrication. The main sections are 1) the design: the contribution of the designer; identification of the circuit’s function, and break-down into functional blocks; computer aided design; 2) mask making (at Rutherford Appleton Laboratory): includes electron beam lithography and ion beam etching; 3) fabrication (at Southampton and Edinburgh Universities): outlines basic differences between NMOS and bipolar. Follows an NMOS process, including alignment of 4th mask, plasma ashing, furnace diffusion, ion implanting and deposition of a metal layer. Microscope close-ups of actual circuit elements are shown, using the Nomarski interference technique; 4) inspection by the designer, stressing the importance of a designer being aware of the fabrication process; 5) anticipated future developments in SERC microfabrication technology. Uses animation sequences to describe the lithographic process prior to mask making and to examine the fabrication process.

Language

English

Country

Great Britain

Medium

Video; Videocassette. Standard formats. col. 20 min.

Year of production

1982

Availability

Free loan

Uses

Undergraduates familiar with the basic principles of microelectronics.*

Subjects

Engineering; Technology

Keywords

electrical and electronic engineering; electronic equipment; engineering design; microcircuits

Credits

Director

Richard Smith

Producer

Richard Smith

Writer

Richard Smith

Contributor

Richard Smith

Cast

Simon Prebble

Distributor

Name

Polaris House

Web

http://www.epsrc.ac.uk External site opens in new window

Phone

01793 444000

Fax

01793 444005

Address

North Star Avenue
Swindon, Wilts SN2 1ET